This paper investigates the high frequency oscillations that arise during the turn-off transient of Si-MOSFET solid-state circuit breakers employing a TVS-RCD snubber. This paper achieves 96-A fault interruption with strongly suppressed ringing. The distinct waveform signatures identified in this work—Miller-plateau ringing in V_gs, lower-frequency snubber-loop resonance in V_dsand I_C, and sharp clamping overshoot at TVS conduction—provide a practical diagnostic map that helps designers trace dominant parasitic paths and directly target improvements in gate routing, snubber layout, and TVS connection when debugging Si-MOSFET SSCBs.